Home >  Term: hazardous production material (HPM) room
hazardous production material (HPM) room

A room used in conjunction with or serving a semiconductor fabrication facility where HPM is stored or used and that is classified as Protection Level 2, Protection Level 3, or Protection Level 4.

0 0

Creator

  • nomura
  •  (Platinum) 6447 points
  • 100% positive feedback
© 2024 CSOFT International, Ltd.